Specific Process Knowledge/Characterization: Difference between revisions
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|align="left"| [[Specific_Process_Knowledge/Characterization/Element_analysis|Element analysis]]||||x||||||||||||||x||x 4 | |align="left"| [[Specific_Process_Knowledge/Characterization/Element_analysis|Element analysis]]||||x||||||||||||||x||x <sup>{{fn|4}}</sup>||||||x <sup>{{fn|4}}</sup>|||||||||||||| | ||
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|align="left"| [[Specific_Process_Knowledge/Characterization/Stress_measurement|Film stress]]||||||||x||||||||||||||||||x 7 | |align="left"| [[Specific_Process_Knowledge/Characterization/Stress_measurement|Film stress]]||||||||x||||||||||||||||||x <sup>{{fn|7}}</sup>|||||||||||||| | ||
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|align="left"| Reflectivity||||||||||||x||x||||||x 6 | |align="left"| Reflectivity||||||||||||x||x||||||x <sup>{{fn|6}}</sup>||||||||||||||||||||x | ||
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|align="left"| Step coverage||x 1 | |align="left"| Step coverage||x <sup>{{fn|1}}</sup>||x <sup>{{fn|1}}</sup>|||||||||||||||||||||||||||||||||||| | ||
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|align="left"| [[Specific_Process_Knowledge/Characterization/Measurement_of_film_thickness_and_optical_constants|Thin film thickness]]||x 1 | |align="left"| [[Specific_Process_Knowledge/Characterization/Measurement_of_film_thickness_and_optical_constants|Thin film thickness]]||x <sup>{{fn|1}}</sup>||x <sup>{{fn|1}}</sup>||x <sup>{{fn|2}}</sup>||x <sup>{{fn|2}}</sup>||x ||x||x||||||x <sup>{{fn|5}}</sup>||x <sup>{{fn|3}}</sup>||||x|||||||||||||| | ||
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|align="left"| [[Specific_Process_Knowledge/Characterization/Thickness_Measurer|Wafer thickness]]||x 1 | |align="left"| [[Specific_Process_Knowledge/Characterization/Thickness_Measurer|Wafer thickness]]||x <sup>{{fn|1}}</sup>||x <sup>{{fn|1}}</sup>||||||||||||x|||||||||||||||||||||||| | ||
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<br clear="all"> | |||
<br> | |||
<sup>{{fn|1}}</sup> Using the cross section method | |||
<sup>{{fn|2}}</sup> Using the create step method | |||
<sup>{{fn|3}}</sup> With known resistivity | |||
<sup>{{fn|4}}</sup> Composition information for crystalline materials | |||
<sup>{{fn|5}}</sup> Only single layer | |||
<sup>{{fn|6}}</sup> Good for characterization of VCSEL structures and DBR mirrors | |||
<sup>{{fn|7}}</sup> Only for crystalline films | |||
== Choose characterization topic == | == Choose characterization topic == | ||