Specific Process Knowledge/Characterization/Tencor P17: Difference between revisions
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'''Feedback to this page''': '''[mailto:Characterization@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler/Apex_software click here]''' | |||
[[Category: Equipment|Characterization Profiler]] | |||
[[Category: Characterization|Profiler]] | |||
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= Tencor P17 Stylus Profiler = | = Tencor P17 Stylus Profiler = | ||
The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as for measuring [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress]]. | The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as for measuring [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress]]. | ||