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!E-beam Lithography Tutorial
!E-beam Lithography Tutorial
|for getting access to [[Specific Process Knowledge/Lithography/EBeamLithography | E-beam Lithography Tools]]
|for getting access to [[Specific Process Knowledge/Lithography/EBeamLithography | E-beam Lithography Tools]]
|This online course is currently under prepration. It will include theory on electron beam lithography and equipment, as well as training in preparation of  exposure files and equipment operation. The course is a prerequisite for hands-on training on the electron beam tool. Currently study material is sent out by the respective equipment trainer.
|This online tutorial will be part of the E-beam TPT and is currently under prepration. It will include theory on electron beam lithography and equipment, as well as training in preparation of  exposure files and equipment operation. The course will be a prerequisite for hands-on training on the electron beam tool. Currently study material is sent out by the respective equipment trainer.
Find more information on the [[LabAdviser/Courses/TPT Ebeam|E-beam Tutorial]].
Find more information on the [[LabAdviser/Courses/TPT Ebeam|E-beam Tutorial]].
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