Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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*[[Specific_Process_Knowledge/Lithography/Aligners/Aligner:_Maskless_01_processing#Alignment|Alignment]] | *[[Specific_Process_Knowledge/Lithography/Aligners/Aligner:_Maskless_01_processing#Alignment|Alignment]] | ||
*[[Specific_Process_Knowledge/Lithography/Aligners/Aligner:_Maskless_01_processing#Optimal_use_of_the_maskless_aligner|Optimal use of the maskless aligner]] | *[[Specific_Process_Knowledge/Lithography/Aligners/Aligner:_Maskless_01_processing#Optimal_use_of_the_maskless_aligner|Optimal use of the maskless aligner]] | ||
===Quality Control (QC)=== | |||
[[Image:section under construction.jpg|70px]] | |||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | |||
|bgcolor="#98FB98" |'''Quality Control (QC) for Aligner: Maskless 01 (MLA1) - Dose and Defoc''' | |||
|- | |||
| | |||
*[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=422 The QC procedure for Aligner: Maskless 01 (MLA1)] - '''requires login'''<br> | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=422 The newest QC data for Aligner: Maskless 01 (MLA1)] - '''requires login''' | |||
{| {{table}} | |||
| align="center" | | |||
{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:300px" | |||
! QC Recipe: | |||
! Dose and defocus test on 1.5µm AZ5214E | |||
|- | |||
|Dose test | |||
|Last QC value ± 20 mJ/cm2 (9 steps total) | |||
|- | |||
|Defoc test | |||
|Last QC value ± 8 mJ/cm2 (9 steps total) | |||
|- | |||
|} | |||
| align="center" valign="top"| | |||
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:400px" | |||
!QC limits | |||
!Aligner: Maskless 01 (MLA1) | |||
|- | |||
|Dose | |||
|none | |||
|- | |||
|Defoc | |||
|none | |||
|- | |||
|} | |||
|- | |||
|} | |||
Dose and defoc values are reported in the QC data sheet. | |||
|} | |||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | |||
|bgcolor="#98FB98" |'''Quality Control (QC) for Aligner: Maskless 01 (MLA1) - Dose and Defoc''' | |||
|- | |||
| | |||
*[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=422 The QC procedure for Aligner: Maskless 01 (MLA1)] - '''requires login'''<br> | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=422 The newest QC data for Aligner: Maskless 01 (MLA1)] - '''requires login''' | |||
{| {{table}} | |||
| align="center" | | |||
{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:300px" | |||
! QC Recipe: | |||
! Dose and defocus test on 1.5µm AZ5214E | |||
|- | |||
|Dose test | |||
|Last QC value ± 20 mJ/cm2 (9 steps total) | |||
|- | |||
|Defoc test | |||
|Last QC value ± 8 mJ/cm2 (9 steps total) | |||
|- | |||
|} | |||
| align="center" valign="top"| | |||
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:400px" | |||
!QC limits | |||
!Aligner: Maskless 01 (MLA1) | |||
|- | |||
|Nominal intensity | |||
|11 mW/cm<sup>2</sup> @ 365 nm | |||
|- | |||
|Intensity deviation from nominal | |||
|≤5% | |||
|- | |||
|Intensity non-uniformity | |||
|≤2% | |||
|- | |||
|} | |||
|- | |||
|} | |||
Power supply and/or lamp will be adjusted if intensity is outside the limit. | |||
|} | |||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||