Specific Process Knowledge/Lithography/nLOF: Difference between revisions
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*PEB temperature: 110°C | *PEB temperature: 110°C | ||
*PEB time: 60 s | *PEB time: 60 s | ||
The recommended PEB for nLOF is 60 seconds at 110°C, regardless of resist film thickness. | The recommended PEB for nLOF is 60 seconds at 110°C, regardless of resist film thickness. | ||