Specific Process Knowledge/Lithography/SU-8: Difference between revisions
| Line 16: | Line 16: | ||
Considering discontinuation of the SU-8 2000 series we need to move to another product. | Considering discontinuation of the SU-8 2000 series we need to move to another product. | ||
Kayaku Advanced Materials, USA (KAM)v has following recommendation: | Kayaku Advanced Materials, USA (KAM)v has following recommendation: | ||
Current Product Target Coat Thickness Recommended Product | Current Product Target Coat Thickness Recommended Product | ||
| Line 28: | Line 26: | ||
After an internal conversation we have decided to try new followings products: | After an internal conversation we have decided to try new followings products: | ||
SU8 3005 instead of SU8 2005 | SU8 3005 instead of SU8 2005 | ||
SU8 3035 instead of SU8 2035 | SU8 3035 instead of SU8 2035 | ||
SU8 XFT75 instead of SU8 2075 | SU8 XFT75 instead of SU8 2075 | ||
And we will also try a new formulation SU8 3025. | And we will also try a new formulation SU8 3025. | ||