Specific Process Knowledge/Lithography/Development: Difference between revisions
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*Automatic agitation methods are not allowed - this includes magnetic stirring or sonication | *Automatic agitation methods are not allowed - this includes magnetic stirring or sonication | ||
*Manual agitation methods, which create large waves or turbulence in the development solution, are not allowed | *Manual agitation methods, which create large waves or turbulence in the development solution, are not allowed | ||
*Users must submit a risk assessment for any process requiring manual beaker development | *Users must submit a risk assessment for any process requiring manual beaker development of TMAH based developers | ||
*Users requiring manual beaker development of TMAH must additionally provide valid reasons for not using the already available automatic and semi-automatic tools | *Users requiring manual beaker development of TMAH based developers must additionally provide valid reasons for not using the already available automatic and semi-automatic tools | ||
===Standard manual beaker development procedure=== | ===Standard manual beaker development procedure=== | ||