Specific Process Knowledge/Lithography/Development: Difference between revisions
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Finally the safety of the operator is at a significantly higher risk, since any manual handling of chemicals carries the risk of accidental spills with it. This is especially problematic if the developer is TMAH based, where direct skin exposure of >1% TMAH on a few percent of the body must be treated as a life-threatening event. | Finally the safety of the operator is at a significantly higher risk, since any manual handling of chemicals carries the risk of accidental spills with it. This is especially problematic if the developer is TMAH based, where direct skin exposure of >1% TMAH on a few percent of the body must be treated as a life-threatening event. | ||
===Special rules for manual beaker development=== | ===Special rules for manual beaker development of TMAH=== | ||
*Automatic agitation methods are not allowed - this includes magnetic stirring or sonication | *Automatic agitation methods are not allowed - this includes magnetic stirring or sonication | ||
*Manual agitation methods, which create large waves or turbulence in the development solution, are not allowed | *Manual agitation methods, which create large waves or turbulence in the development solution, are not allowed | ||
*Users must submit a risk assessment for | *Users must submit a risk assessment for any process requiring manual beaker development | ||
*Users requiring manual beaker development of TMAH | *Users requiring manual beaker development of TMAH must additionally provide valid reasons for not using the already available automatic and semi-automatic tools | ||
===Standard manual beaker development procedure=== | ===Standard manual beaker development procedure=== | ||