Specific Process Knowledge/Lithography/Development: Difference between revisions
| Line 366: | Line 366: | ||
*Manual agitation methods, which create large waves or turbulence in the development solution, are not allowed | *Manual agitation methods, which create large waves or turbulence in the development solution, are not allowed | ||
*Users must submit a risk assessment for any process requiring manual beaker development | *Users must submit a risk assessment for any process requiring manual beaker development | ||
* | *Users requiring manual beaker development of TMAH must provide valid reasons for not using the already available automatic and semi-automatic tools | ||
===Standard manual beaker development procedure=== | ===Standard manual beaker development procedure=== | ||