LabAdviser/Courses/TPT SEM

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The SEM Tool Package Training

DTU Nanolab offers a Tool Package Training (TPT) course in Scanning Electron Microscopy (SEM). This course is mandatory for academic users who want to perform SEM imaging at Nanolab unless you will only use the Hitachi TM3030 tabletop SEM. The course includes theory on scanning electron microscopy (including some reading and online lectures) followed by by quizzes for each section, as well as training videos for equipment operation. After completing the online course, a practical group training can be arranged.

The SEMs at DTU Nanolab are located in building 314/307, 346, and 375. Different SEMs are used for different applications, and the practical training requirements differ from building to building and from SEM to SEM. The main SEM and TEM building is 314/307, which is open for all users from academia and industry. The SEM in building 375 is owned by DTU Offshore and the SEMs in building 346 are reserved for users who work with fabrication at Nanolab, i.e., in the cleanroom or the other labs in buildings 346 and 347.

The SEM TPT course is available via DTU Learn. You can find it and enroll yourself here.

Course Plan (Building 314/307 and 375)

To gain access to the microscopes in building 314, 307 or 375, please register here and sign up for the theoretical online course (SEM TPT) in DTU Learn here.

You will receive an invitation to a meeting at 314 to discuss your project and requirements. The structure of the hands-on training depends heavily on the type of sample, type of characterization, i.e., which SEM, detectors, and sample preparation technique will be used, as well as previous user experience.

1. Register to gain access to building 314 (here)
2. Register for SEM TPT in DTU Learn (here)
3. Meeting at 314 to discuss your project
4. SEM TPT: Online reading & lecture videos (theory)
5. SEM TPT: Quizzes for each section
6. Safety course for access to building 314
7. Individual hands-on training

Commercial Users:

The theoretical part of the SEM TPT (3. and 4.) is not mandatory for commercial users, though we strongly recommend it for new users.

Course Plan (Building 346)

To gain access to the SEMS in building 346 you need to have access to the cleanroom (please sign up here) or access to the basement in 346 (please sign up here). Please sign up for the theoretical online course (SEM TPT) in DTU Learn here.

How to get access to SEM in building 346

1. Register gain access to building 346 (basment 346 or cleanroom)
2. Register for SEM TPT in DTU Learn (here)
3. Online reading & lecture videos (theory)
4. Quizzes for each section
5. Online training videos (equipment operation)
6. Read SEM Supra 1 (or SEM Supra 3) manual
7. Group hands-on training (SEM Supra 1 in basement 346)*
8. Individual hands-on training (commonly SEM Supra 1 in basement 346 or SEM Supra 3 in cleanroom)

(*) If a group hands-on training session is timely available, company users are expected to join the group session, else two individual hands-on training sessions can be arranged. Individual hands-on training can be requested via training@nanolab.dtu.dk.

As an alternative to watching the lecture videos online, an in-person lecture is offered on an irregular basis, mostly in combination with PhD courses or 3-week courses. You can contact the SEM group to inquire for a date or check the course page in DTU Learn.

Individual hands-on training can be requested after completion of the theoretical course via sem@nanolab.dtu.dk.

Commercial Users:

The theoretical part of the SEM TPT (3. and 4.) is not mandatory for commercial users, though we strongly recommend it for new users. All users must watch the online training videos explaining the equipment operation (5.) of our SEMs and read the manual of the respective SEM prior to the hands-on training.

Qualifying Prerequisites (building 346)

• Cleanroom safety course (sign up here), or
• Intro building 346 (sign up here, choose option: "Basement, polisher lapper/155 and dicer/157")

General course info

Learning objectives

• Explain SEM electron optics and detectors
• Understand possibilities and limitations of SEM
• Know how to optimize SEM images
• Know which tool to use and who to contact

Course Responsible

• Jonas Michael-Lindhard (346)
• Rebecca Bolt Ettlinger (346)
• Berit Wenzel (314/307)
• Marie Karen Trace Hong Lin (314/307) - Softmatter and life science samples

If you have questions you can contact us via SEM@nanolab.dtu.dk.

Material for preparations and further information

Please watch before the first hands-on training

• Equipment operation training videos (10 vidoes, total duration < 30 min)

Please read the SEM manuals before the second hands-on training

• SEM Supra 1 manual (outside cleanroom: 346/904)
• SEM Supra 2 manual
• SEM Supra 3 manual
• SEM Gemini 1 manual
• SEM Tabletop 1 manual (outside cleanroom: 346/151)