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Specific Process Knowledge/Lithography/Descum: Difference between revisions

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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,915 edits
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! style="text-align: left;" | Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15
! style="text-align: left;" | Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15
|-
|-
| style="text-align: left;" | Film thickness range, before descum [nm]: || 11 || 13 || 11 || 12 || 14
| style="text-align: left;" | Pre-descum film thickness range [nm]: || 11 || 13 || 11 || 12 || 14
|-
|-
| style="text-align: left;" | Pre-ashing non-uniformity [%]: || 0.37 || 0.43 || 0.37 || 0.40 || 0.46
| style="text-align: left;" | Pre-descum non-uniformity [%]: || 0.37 || 0.43 || 0.37 || 0.40 || 0.46
|-
|-
| style="text-align: left;" | Film thickness range, after descum [nm]: || 11 || 9 || 10 || 12 || 21
| style="text-align: left;" | Post-descum film thickness range [nm]: || 11 || 9 || 10 || 12 || 21
|-
|-
| style="text-align: left;" | Post-ashing non-uniformity [%]: || 0.37 || 0.30 || 0.33 || 0.41 || 0.74
| style="text-align: left;" | Post-descum non-uniformity [%]: || 0.37 || 0.30 || 0.33 || 0.41 || 0.74
|}
|}


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