Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
| Line 772: | Line 772: | ||
== Aligner: Maskless 04 == | == Aligner: Maskless 04 == | ||
<span style="background:#FF2800">THIS SECTION IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]] | |||
[[Image:Heidelberg_uMLA.JPG|300x300px|thumb|Aligner: Maskless 04 is installed in PolyFabLab in building 347.]] | [[Image:Heidelberg_uMLA.JPG|300x300px|thumb|Aligner: Maskless 04 is installed in PolyFabLab in building 347.]] | ||