Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
| Line 13: | Line 13: | ||
This page was originally intended as a regular one-machine page (the Pegasus 1 page). However, as of 2018 with several tools, the page will serve as common page for all of our Pegasi with subpages for each tool. | This page was originally intended as a regular one-machine page (the Pegasus 1 page). However, as of 2018 with several tools, the page will serve as common page for all of our Pegasi with subpages for each tool. | ||
{| | |||
|width="100"| [[file:DRIE-Pegasus.jpg |200px|frameless]] | |||
| width="200"| [[file:Pegasus 2 operator.jpg |408px|frameless]] | |||
| width="275"|[[file:Peg3and4 front 2.JPG |584px|frameless]] | |||
|- | |||
| align="center" | The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}} | |||
| align="center" | The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1. {{photo1}} | |||
| align="center" | The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations. {{photo1}} | |||
|- | |||
|} | |||
{| | {| | ||