Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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'''*''' '' | '''*''' ''See table in manual with max. allowed rate and cumulative thickness. If you would like to deposit more than the limit in the table, please request permission from metal@nanolab.dtu.dk '''no matter if it is a single layer or a number of deposition runs adding up to a total thickness exceeding the limit'''. This is so we can ensure that enough material will be present and that the the machine can be cleaned up as needed as thick layers can cause flaking.'' | ||
'''**''' ''Defined as the ratio of the standard deviation to the average of the measurement made using the DektakXT. For further details see the acceptance test.'' | '''**''' ''Defined as the ratio of the standard deviation to the average of the measurement made using the DektakXT. For further details see the acceptance test.'' | ||