Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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The system offers top side alignment with high accuracy. | The system offers top side alignment with high accuracy. | ||
Link to information about [[Specific_Process_Knowledge/Pattern_Design#Alignment_marks|alignment mark design]]. | |||
The user manual and contact information can be found in LabManager: | The user manual and contact information can be found in LabManager: | ||