Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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===Light intensity and uniformity after lamp ignition=== | ===Light intensity and uniformity after lamp ignition=== | ||
[[image:MA6-2_light_intensity_and_uniformity_from_ignition.png|400px|right|thumb|Light intensity and uniformity after lamp ignition. CP is constant power mode, CI is constant intensity mode. The accept limits for the CI mode is ±5%, the accept limit for the non-uniformity is 2%. CP mode has no accept limit.]] | |||
The lamp requires about 15 minutes of on-time after lamp ignition, before the light output has stabilized, and users using the constant power mode should always wait for 15 minutes after ignition, before starting processing. | |||
If users use the constant intensity mode, this waiting time is not necessary, since the internal light sensor automatically adjusts the output to match the setpoint value. | |||
The non-uniformity of the light, in CI mode, is unaffected by the stabilization time. | |||
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