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Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano121: Difference between revisions

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Bureaucrats, danchip, Administrators
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<gallery caption="The results of the nano1.2 recipe" widths="250" heights="200" perrow="3">
<gallery caption="The results of the nano1.21 recipe" widths="250" heights="200" perrow="3">
image:WF_2E06_mar23B-030.jpg|The 30 nm trenches
image:WF_2E06_mar23B-030.jpg|The 30 nm trenches
image:WF_2E06_mar23B-060.jpg|The 60 nm trenches
image:WF_2E06_mar23B-060.jpg|The 60 nm trenches
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