Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace: Difference between revisions
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[[Category: Furnaces|A2]] | [[Category: Furnaces|A2]] | ||
==The Resist Pyrolysis furnace== | ==The Resist Pyrolysis furnace (research tool)== | ||
[[Image:ATV_ovn.jpg|thumb|365x365px|Resist Pyrolysis furnace. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]] | [[Image:ATV_ovn.jpg|thumb|365x365px|Resist Pyrolysis furnace. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]] | ||