Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
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==The Set-Up== | ==The Set-Up== | ||
The machine consists of a reactor chamber, in which different samples can be processed/annealed at temperatures up to | The machine consists of a reactor chamber, in which different samples can be processed/annealed at temperatures up to 1100 °C. | ||
The chamber can be heated up very rapidly by the use of 18 infrared halogen lamps that are situated in the chamber lid. A quartz plate is placed below the lamps, i.e. between the lamps and the sample(s). Below the platen, there is an optical pyrometer aligned with the center of the substrate, that is placed on the bottom part of the chamber. The platen presents additional inlets where multiple thermocouples can be mounted (image on the right). | The chamber can be heated up very rapidly by the use of 18 infrared halogen lamps that are situated in the chamber lid. A quartz plate is placed below the lamps, i.e. between the lamps and the sample(s). Below the platen, there is an optical pyrometer aligned with the center of the substrate, that is placed on the bottom part of the chamber. The platen presents additional inlets where multiple thermocouples can be mounted (image on the right). | ||