Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace: Difference between revisions
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==Process information== | ==Process information== | ||
*[[Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance test|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]] | *[[Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance test|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]] | ||
*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace|Pyrolysis]] | *[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace|Pyrolysis]] | ||
*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page | |||
*Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation|Oxidation]] page | |||
==Overview of the performance of the Resist Pyrolysis furnace and process related parameters== | ==Overview of the performance of the Resist Pyrolysis furnace and process related parameters== | ||