Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano10: Difference between revisions
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| Hardware configuration | |||
| 150mm Long funnel, with baffle & 100mm spacers | |||
|- | |||
| APC Gain | |||
| 7.5 (default) | |||
|- | |||
| Platen Temperature | |||
| 10°C | |||
|} | |} | ||