Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
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*Silicon wafers | *Silicon wafers | ||
*and almost any other | *and almost any other as long as it does not degas. | ||
*See cross-contamination sheet [https://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=244] | |||
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| style="background:LightGrey; color:black"|Material allowed on the substrate | | style="background:LightGrey; color:black"|Material allowed on the substrate | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*almost any | *almost any as long as it does not degas. | ||
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