Specific Process Knowledge/Characterization/Profiler: Difference between revisions

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 |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence)
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-For very well defined steps ~ 2 % for a 1 µm step and ~ 1 % for a 25 µm step (read about reducing and estimating the measurement uncertainty [[/Stylus profiler measurement uncertainty|here]])
+~ 2 % for a 1 µm step with the smallest measurement range and ~ 1 % for a 25 µm step ''for well-defined steps that are easy to measure'' (read about reducing and estimating the measurement uncertainty [[/Stylus profiler measurement uncertainty|here]])
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 |style="background:LightGrey; color:black"|Max scan depth as a function of trench width W
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 | style="background:LightGrey; color:black"|Substrate materials allowed
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-*All materials that do not stick to the tip
+*All materials that do not stick to the tip or leave residues on the chuck
 *For very soft polymers we recommend the Dektak 150, see below
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