Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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|style="background:LightGrey; color:black"|Gas flows | |style="background:LightGrey; color:black"|Gas flows | ||
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* SF<sub>6</sub>: 0 to 1200 sccm | |||
* O<sub>2</sub>: 0 to 200 sccm | |||
* C<sub>4</sub>F<sub>8</sub>: 0 to 400 sccm | |||
* Ar: 0 to 283 sccm | |||
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* SF<sub>6</sub>-1: 0 to 1200 sccm | * SF<sub>6</sub>-1: 0 to 1200 sccm | ||