Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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==Spin Coater: Gamma UV== | ==Spin Coater: Gamma UV== | ||
[[Image:HMDS gammaUV.jpg|300x300px|thumb|HMDS module in Spin Coater: Gamma UV in E-5.]] | [[Image:HMDS gammaUV.jpg|300x300px|thumb|HMDS module (top) in Spin Coater: Gamma UV in E-5.]] | ||
The user manual, user APV, and contact information can be found in LabManager: | The user manual, user APV, and contact information can be found in LabManager: | ||