Specific Process Knowledge/Thermal Process/C4 Aluminium Anneal furnace: Difference between revisions
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**Aluminium | **Aluminium | ||
**Al<sub>2</sub>O<sub>3</sub> deposited by ALD | **Al<sub>2</sub>O<sub>3</sub> deposited by ALD | ||
*Other materials might be allowed in the furnace, but | *Other materials might be allowed in the furnace, but it requires a permission from the Thin Film group | ||
wafers with aluminium. | wafers with aluminium. | ||