Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
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When using the temperature control mode, the thermocouple is usually the recommended sensor. However, this recommendation varies a lot depending on the desired conditions for the process. See the table below. | When using the temperature control mode, the thermocouple is usually the recommended sensor. However, this recommendation varies a lot depending on the desired conditions for the process. See the table below. | ||
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|style="background:LightGrey; color:black;" align="center"|<b>Room temperature to 400 °C</b> | |||
|style="background:WhiteSmoke; color:black;" align="center"|<b>400 °C to 850 °C</b> | |||
|style="background:WhiteSmoke; color:black;" align="center"|<b>850 °C to 1000 °C</b> | |||
|style="background:WhiteSmoke; color:black;" align="center"|<b> 1000 °C to 1200 °C</b> | |||
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!style="background:Silver; color:black" align="center" align="center" rowspan="2"|Pressure conditions | |||
|style="background:Silver; color:black"|Vacuum | |||
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* 400 <sup>o</sup>C to 1200 <sup>o</sup>C | |||
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|style="background:Silver; color:black"|No Vacuum | |||
|style="background:LightGrey; color:black"| | |||
* Room temperature to 1200 <sup>o</sup>C | |||
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'''*Important!''' The thermocouples are not intended to be used for high-temperature processes - a lifetime reduction can be expected if they are used in such conditions. Therefore, when processing at 1000 °C or above, the thermocouples must be pulled down. Consequently, the pyrometer should be chosen as the temperature control method in the recipe. These changes to the thermocouples should only be carried out by the responsible persons. | '''*Important!''' The thermocouples are not intended to be used for high-temperature processes - a lifetime reduction can be expected if they are used in such conditions. Therefore, when processing at 1000 °C or above, the thermocouples must be pulled down. Consequently, the pyrometer should be chosen as the temperature control method in the recipe. These changes to the thermocouples should only be carried out by the responsible persons. | ||