Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
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|style="background:WhiteSmoke; color:black;" align="left"|5/6 mbar, if minimum gas flow is used during process. | |style="background:WhiteSmoke; color:black;" align="left"|5/6 mbar, if minimum gas flow is used during process. | ||
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!style="background:Silver; color:black" align="center" align="center" rowspan="8"|Process time | !style="background:Silver; color:black" align="center" align="center" rowspan="8"|Process time* | ||
(Check image below) | (Check image below) | ||
|style="background:Silver; color:black"|At 1200 <sup>o</sup>C | |style="background:Silver; color:black"|At 1200 <sup>o</sup>C | ||
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'''Remark!''' The time limits are not implemented in the software, but it is very important to obey these. If processing is done for longer times than those defined in the table, there is a certain risk that the chamber gets overheated, which can lead to damage of the equipment. | '''*Remark!''' The time limits are not implemented in the software, but it is very important to obey these. If processing is done for longer times than those defined in the table, there is a certain risk that the chamber gets overheated, which can lead to damage of the equipment. | ||
==Additional information== | ==Additional information== | ||
The '''user manual''', user '''APV''', '''technical and contact information''' can be found in LabManager: '''[http://www.labmanager.dtu.dk/function.php?module=Machine&view=view&mach=459 RTP2 Jipelec]''' | The '''user manual''', user '''APV''', '''technical and contact information''' can be found in LabManager: '''[http://www.labmanager.dtu.dk/function.php?module=Machine&view=view&mach=459 RTP2 Jipelec]''' | ||