Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
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|style="background:WhiteSmoke; color:black;" align="left"|5/6 mbar, if minimum gas flow is used during process. | |style="background:WhiteSmoke; color:black;" align="left"|5/6 mbar, if minimum gas flow is used during process. | ||
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!style="background:Silver; color:black" align="center" align="center" rowspan=" | !style="background:Silver; color:black" align="center" align="center" rowspan="8"|Process time | ||
(Check image below) | (Check image below) | ||
|style="background:Silver; color:black"|At 1200 <sup>o</sup>C | |style="background:Silver; color:black"|At 1200 <sup>o</sup>C | ||