Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
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|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
*40-2000 sccm | *40-2000 sccm | ||
|style="background:WhiteSmoke; color:black;" align="left"|''' | |style="background:WhiteSmoke; color:black;" align="left"| Gas line '''not connected yet'''. | ||
|- | |- | ||
|style="background:Silver; color:black"|Nitrogen purge (N<sub>2</sub>) | |style="background:Silver; color:black"|Nitrogen purge (N<sub>2</sub>) | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
* | *Not possible to control the flow | ||
|style="background:WhiteSmoke; color:black;" align="center"| | |style="background:WhiteSmoke; color:black;" align="center"| Do '''not use''' for '''processing'''. | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Pressure | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Pressure | ||