Specific Process Knowledge/Lithography/Mix-and-match: Difference between revisions
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===Test process=== | ===Test process=== | ||
Resist used is nLOF2020 diluted in a ratio of 27 grams of resist mixed with 51 grams of PGMEA. The resist is spin coated on Labspin 2 at 2000 RPM for 1 min (1000 RPM/s acceleration). The wafer is then soft baked at 110C for 60 seconds. | Resist used is nLOF2020 diluted in a ratio of 27 grams of resist mixed with 51 grams of PGMEA. The resist is spin coated on Labspin 2 at 2000 RPM for 1 min (1000 RPM/s acceleration). The wafer is then soft baked at 110C for 60 seconds. Resist thickness is 250 nm. | ||
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A test pattern is exposed with doses from 100 to 600 µC/cm<sup>2</sup>. After EBL exposure a UV test pattern is exposed on MLA2 utilizing alignment to the exposed resist. After exposure the wafer is developed on Developer: TMAH UV-Lithography using recipe 3005, i.e. a 60 second PEB at 110C and 30 sec single puddle development cycle. | A test pattern is exposed with doses from 100 to 600 µC/cm<sup>2</sup>. After EBL exposure a UV test pattern is exposed on MLA2 utilizing alignment to the exposed resist. After exposure the wafer is developed on Developer: TMAH UV-Lithography using recipe 3005, i.e. a 60 second PEB at 110C and 30 sec single puddle development cycle. | ||
===Contrast curve=== | ===Contrast curve=== | ||