Specific Process Knowledge/Lithography/Mix-and-match: Difference between revisions
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===EBL results=== | ===EBL results=== | ||
A contrast curve is generated using the parameters described above. | A contrast curve is generated using the parameters described above. | ||
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Contrast curve for 250 nm nLOF2020 exposed at 100 kV on JEOL 9500. Image: Thomas Pedersen. | |||
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