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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
Line 491: Line 491:
!Shearing [mRad]
!Shearing [mRad]
!Misalignment [µm]
!Misalignment [µm]
!Translation [µm]
!Run-out [ppm]
!Run-out [ppm]
!Rotation [ppm]
!Rotation [ppm]
Line 505: Line 504:
|rowspan="2" align="center"|0.004
|rowspan="2" align="center"|0.004
| -0.5±0.08
| -0.5±0.08
| -0.51±0.05
| -0.3±1.7
| -0.3±1.7
| 0.6±1.2
| 0.6±1.2
Line 514: Line 512:
| 9
| 9
| -0.3±0.08
| -0.3±0.08
| -0.27±0.05
| 1.1±1.7
| 1.1±1.7
| -1.1±1.2
| -1.1±1.2
Line 528: Line 525:
|rowspan="2" align="center"|0.004
|rowspan="2" align="center"|0.004
| -0.95±0.13
| -0.95±0.13
| -0.92±0.05
| -1.1±2.5
| -1.1±2.5
| -0.8±1.3
| -0.8±1.3
Line 537: Line 533:
| 7
| 7
| 0.1±0.1
| 0.1±0.1
| 0.07±0.06
| -1.1±1.7
| -1.1±1.7
| -0.8±2.5
| -0.8±2.5
Line 551: Line 546:
|rowspan="2" align="center"|0.003
|rowspan="2" align="center"|0.003
| -0.65±0.05
| -0.65±0.05
| -0.63±0.05
| -0.6±1.7
| -0.6±1.7
| 0.3±1.2
| 0.3±1.2
Line 560: Line 554:
| 8
| 8
| -0.25±0.05
| -0.25±0.05
| -0.26±0.05
| 0.3±1.7
| 0.3±1.7
| -0.3±1.2
| -0.3±1.2
Line 573: Line 566:
|rowspan="2"|NA
|rowspan="2"|NA
| -0.75±0.3
| -0.75±0.3
| -0.75±0.05
| -8.9±1.7
| -8.9±1.7
| -1.4±2.5
| -1.4±2.5
Line 582: Line 574:
| NA
| NA
| -0.55±0.28
| -0.55±0.28
| -0.58±0.05
| -6.1±2.5
| -6.1±2.5
| -0.8±1.2
| -0.8±1.2
Line 589: Line 580:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|rowspan="2"|2 alignment marks
|rowspan="2"|2 alignment marks
375nm, high res camera


(Taran Apr 2019)
(Taran Apr 2019)
Line 596: Line 586:
|rowspan="2"|NA
|rowspan="2"|NA
| 0.25±0.15
| 0.25±0.15
| 0.25±0.05
| 1.7±1.7
| 1.7±1.7
| 2.2±1.3
| 2.2±1.3
Line 605: Line 594:
| NA
| NA
| 0.3±0.13
| 0.3±0.13
| 0.29±0.05
| 0.8±1.7
| 0.8±1.7
| 0.0±1.7
| 0.0±1.7
Line 612: Line 600:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|rowspan="2"|4 alignment marks
|rowspan="2"|4 alignment marks
375nm, high res camera


(Taran Apr 2019)
(Taran Apr 2019)
Line 619: Line 606:
|rowspan="2" align="center"|0.001
|rowspan="2" align="center"|0.001
| 0.2±0.05
| 0.2±0.05
| 0.17±0.05
| -0.6±1.7
| -0.6±1.7
| 0.3±1.2
| 0.3±1.2
Line 628: Line 614:
| -1
| -1
| 0.4±0.05
| 0.4±0.05
| 0.42±0.05
| 0.6±1.7
| 0.6±1.7
| 0.6±1.2
| 0.6±1.2
Line 635: Line 620:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|rowspan="2"|4 alignment marks
|rowspan="2"|4 alignment marks
375nm, low res camera
Low Res camera


(Taran Apr 2019)
(Taran Apr 2019)
Line 642: Line 627:
|rowspan="2" align="center"|0.002
|rowspan="2" align="center"|0.002
| -0.05±0.13
| -0.05±0.13
| -0.06±0.05
| -1.9±1.7
| -1.9±1.7
| 0.8±1.3
| 0.8±1.3
Line 650: Line 634:
|'''Y'''
|'''Y'''
| -2
| -2
| 0.3±0.05
| 0.3±0.05
| 0.3±0.05
| -0.6±1.7
| -0.6±1.7
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