Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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'''Alignment test | '''Alignment test''' (unless otherwise stated, these tests use 375nm laser, High Res camera, and Quality exposure) | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2"|4 alignment marks | |rowspan="2"|4 alignment marks | ||
(Taran Apr 2023) | (Taran Apr 2023) | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2"|4 alignment marks | |rowspan="2"|4 alignment marks | ||
Low Res camera | |||
(Taran Apr 2023) | (Taran Apr 2023) | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2"|4 alignment marks | |rowspan="2"|4 alignment marks | ||
Fast exposure | |||
(Taran Apr 2023) | (Taran Apr 2023) | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2"|2 alignment marks | |rowspan="2"|2 alignment marks | ||
(Taran Apr 2023) | (Taran Apr 2023) | ||
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'''Alignment test with scaled first print | '''Alignment test with scaled first print''' | ||
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