Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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<span style="color:red">New specs after the new writehead has been installed - section will be updated soon.</span> | <span style="color:red">New specs after the new writehead has been installed - section will be updated soon.</span> | ||
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'''Overlay accuracy (spec):''' 0.25 µm (5x5 mm<sup>2</sup> area) | '''Overlay accuracy (spec):''' 0.25 µm (5x5 mm<sup>2</sup> area) | ||