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Specific Process Knowledge/Back-end processing/Micro transfer printer: Difference between revisions

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Meenadh (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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Micro transfer printing is an emerging technique to transfer diverse and non-native components from source substrate to target substrate. Micro transfer printing is best for achieving heterogeneous integration, where micro-components from different sources are picked up by polymer stamp and preciesly assembled onto different target substrate such as glass, plastic, ceramic and silicon. This method is known for increasing functinality and improving efficiency.  
Micro transfer printing is an emerging technique to transfer diverse and non-native components from source substrate to target substrate. Micro transfer printing is best for achieving heterogeneous integration, where micro-components from different sources are picked up by polymer stamp and preciesly assembled onto different target substrate such as glass, plastic, ceramic and silicon. This method is known for increasing functinality and improving efficiency.  


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Micro transfer printer 100 from Xdisplay was installed in year 2022 and placed in cleanroom E-4.
'''[https://www.youtube.com/playlist?list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV Training videos]'''
-->


Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=503 LabManager] - '''requires login'''
Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=503 LabManager] - '''requires login'''
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{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;"  
{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;"  


!style="background:silver; color:black;" width="60"|Purpose
|style="background:WhiteSmoke; color:black" colspan="2"|
Pick and Print


!style="background:silver; color:black;" align="center" width="60"|Purpose
|style="background:LightGrey; color:black"|
|style="background:WhiteSmoke; color:black" colspan="2"|UV exposure
|-
|-
!style="background:silver; color:black;" width="60"|Material handling configuration
|style="background:WhiteSmoke; color:black" colspan="2"|
Manual


!style="background:silver; color:black" align="left" rowspan="5"|Performance
|style="background:LightGrey; color:black"|Exposure mode
|style="background:WhiteSmoke; color:black" colspan="2"|
*Flood exposure
*Proximity exposure with mask possible for 4inch substrate
*Inclined exposure
*Rotating exposure
|-
|-
| style="background:LightGrey; color:black"|Exposure light/filters
!style="background:silver; color:black;" width="60"|Stage max. travel time (X x Y mm)
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
* Near UV(350-450nm)
300 x 300
* Mid UV (260-320nm)
* Deep UV(220-260nm)


|-
|-
|style="background:LightGrey; color:black"|Minimum structure size
!style="background:silver; color:black;" width="60" |Source size (mm)
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
upto 150


|-
|-
|style="background:LightGrey; color:black"|Mask size
!style="background:silver; color:black;" width="60"|Target size (mm)
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
5x5inch optinal
upto 150
 
|-
|-
|style="background:LightGrey; color:black"|Alignment modes
!style="background:silver; color:black;" width="60"|Alignment accuracy (single post stamp)
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
No alignment possible
<0.5um


|-
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
!style="background:silver; color:black" align="left" rowspan="3"|Allowed material
|style="background:LightGrey; color:black"|Substrate size
|style="background:WhiteSmoke; color:black" colspan="2"|
Up to 8inch substrates, different shapes
|-
| style="background:LightGrey; color:black"|Allowed materials
|style="background:WhiteSmoke; color:black" colspan="2"|
|style="background:WhiteSmoke; color:black" colspan="2"|
All cleanroom materials
All cleanroom materials
|-
 
|style="background:LightGrey; color:black"|Batch
|style="background:WhiteSmoke; color:black" colspan="2"|
1
|-  
|-  
|}
|}


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