Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
Appearance
| Line 89: | Line 89: | ||
! width="350" | | ! width="350" | | ||
|+'''Design case: Five 100 µm wide, 40 mm long lines, spaced 10 mm apart (40x40 mm<sup>2</sup>)''' | |+'''Design case: Five 100 µm wide, 40 mm long lines, spaced 10 mm apart (40x40 mm<sup>2</sup>). Data and graphics by Thomas Anhøj @ DTU Nanolab, 2019-2023.''' | ||
|- border="0" align="center" | |- border="0" align="center" | ||
|[[Image:MLA150_LongLinesEW.JPG|300px]] | |[[Image:MLA150_LongLinesEW.JPG|300px]] | ||