Specific Process Knowledge/Back-end processing/Micro transfer printer: Difference between revisions
No edit summary |
|||
| Line 4: | Line 4: | ||
[[Category: Equipment|Backend]] | [[Category: Equipment|Backend]] | ||
[[Category: | [[Category: Back-end_processing]] | ||
__TOC__ | __TOC__ | ||
Revision as of 09:43, 31 August 2023
The contents on this page, including all images and pictures, was created by DTU Nanolab staff unless otherwise stated.
Feedback to this page: click here
Stylus Profiler: Dektak150
TextTextTextTextTextText TextTextText
TextTextTextTextText TextTextText
Equipment info in LabManager - requires login
TextTextTextTextTextText TextText
| Purpose |
UV exposure | ||
|---|---|---|---|
| Performance | Exposure mode |
| |
| Exposure light/filters |
| ||
| Minimum structure size | |||
| Mask size |
5x5inch optinal | ||
| Alignment modes |
No alignment possible | ||
| Substrates | Substrate size |
Up to 8inch substrates, different shapes | |
| Allowed materials |
All cleanroom materials | ||
| Batch |
1 | ||