Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Nitride Etch: Difference between revisions
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|Etch rate of Mir resist | |Etch rate of Mir resist | ||
|'''?nm/min | |'''? nm/min | ||
|'''? nm/min | |'''? nm/min | ||
Bghe (talk | contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,318 edits |
Bghe (talk | contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,318 edits |
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|Etch rate of Mir resist | |Etch rate of Mir resist | ||
|'''?nm/min | |'''? nm/min | ||
|'''? nm/min | |'''? nm/min | ||