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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,304 edits
Line 10: Line 10:
  [[Image:Peg3and4 front 2.JPG |frame|left|x300px|The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations, {{photo1}}]]
  [[Image:Peg3and4 front 2.JPG |frame|left|x300px|The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations, {{photo1}}]]


'''The user manual and contact information can be found in LabManager:'''


The user manual(s), quality control procedure(s) and results, user APV(s) '''are not available''', technical information and contact information can be found in LabManager:
<!-- give the link to the equipment info page in LabManager: -->
 
[http://labmanager.nanolab.dtu.dk/function.php?module=Machine&view=view&mach=456 DRIE Pegasus 4 in LabManager - requires login]
Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=456| LabManager]


== Process information ==
== Process information ==
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-4"