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DTU Nanolab offers a Tool Package Training (TPT) course in Scanning Electron Microscopy (SEM). The course includes theory on SEM, as well as training in instrument operation.  
DTU Nanolab offers a Tool Package Training (TPT) course in Scanning Electron Microscopy (SEM). The course includes theory on SEM, as well as training in instrument operation.  


The course is for all users who intend to perform any kind of SEM related processes, and for all new SEM users it is mandatory to attend the course.  
The course is for all users who intend to perform any kind of SEM related processes, and for all new SEM users it is mandatory to attend the course unless you will only use the [[Specific Process Knowledge/Characterization/SEM_Tabletop_1|Hitachi TM3030 tabletop SEM]] in building 451.  


The first part of the course is a lecture. After the lecture, practical SEM trainings will be arranged.
The first part of the course is a lecture. After the lecture, practical SEM trainings will be arranged.


The SEMs at DTU Nanolab are located in building 314, 346 and 375. The SEMs are used for different applications, and how the practical trainings are conducted differs for the different buildings and in some cases also for the different SEMs. Please be aware that only users who are going to work in building 346 (the cleanroom building) can get training at the SEMs there.
The SEMs at DTU Nanolab are located in building 314, 346, 375, and 451. The main SEM and TEM building is 314, which is open for all users from academia and industry. The SEMs are used for different applications, and how the practical trainings are conducted differs for the different buildings and in some cases also for the different SEMs. Please be aware that only users who work with fabrication at Nanolab (in the cleanroom or in the other labs in buildings 346 and 451) can get training at the SEMs in these buildings.




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'''Theoretical part:'''
'''Theoretical part:'''
* A 3-hour lecture. The first parts of the lecture provides an introduction to SEM theory including electron optics and image formation. In the second part of the lecture some more practical details about the SEMs at DTU Nanolab are presented, including a description of different detectors and some sample preparation and mounting methods.  
* A 3-hour lecture. The first part of the lecture provides an introduction to SEM theory including electron optics and image formation. The second part of the lecture concerns practical details about the SEMs at DTU Nanolab including the detectors, sample preparation, and tips and tricks.  
* The lecture is held approximately once a month. The date(s), time and location for the next lecture(s) can be seen in this Doodle: <br /> https://doodle.com/meeting/participate/id/b8E3ZDWd <br /> <i> It is also possible to see some videos of the lecture in DTU Learn if you contact the responsible persons.</i>
* The lecture is held approximately once a month. The date(s), time and location for the next lecture(s) can be seen in this Doodle: <br /> https://doodle.com/meeting/participate/id/b8E3ZDWd <br /> <i> It is also possible to see some videos of the lecture in DTU Learn if you contact the responsible persons.</i>


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'''Practical part:'''
'''Practical part:'''
* Users will first have to attend a two hour SEM training session in groups of 2(-3) persons. For this training the SEM Supra 1 will be used, and some different training samples will be studied.
* Users first attend a 2-hour SEM training session in groups of 2-3 people. For this training [[Specific Process Knowledge/Characterization/SEM_Supra_1|SEM Supra 1]] will be used to study standard training samples.
* After the group training session, users should have one or more individual training to the SEM Supra 1, before they will be authorized to operate the SEM alone. Users should bring their own sample for the training(s).
* After the group session, users have one or more individual trainings before they are authorized to operate the SEM alone. Users should bring their own sample for the individual training(s).  
* ''Notice that if you need to bring a sample out of the cleanroom for individual training on SEM Supra 1, you will have to [[Specific_Process_Knowledge/Wafer_cleaning|clean it]] to bring it back into the cleanroom.''
* After at least four hours of independent SEM Supra 1 usage (after the training sessions), users can request additional trainings for the SEM Supra 2 and 3 in the cleanroom.
* After at least four hours of independent SEM Supra 1 usage (after the training sessions), users can request additional trainings for the SEM Supra 2 and 3 in the cleanroom.
* As Supra 1 can get busy, in some cases the user may transition straight to individual training on Supra 2 and 3 after the group training. Ask staff if this may apply to you.
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