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Specific Process Knowledge/Characterization/Profiler: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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Reet (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
1,745 edits
Line 94: Line 94:
*Using the analysis software from outside the cleanroom: [[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access & tips]]
*Using the analysis software from outside the cleanroom: [[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access & tips]]


*Info about making [[:File:2D stress section of P17 manual moved to Labadviser.docx|2D stress measurements]]. This text was removed from the user manual in LabManager as most users make 3D stress measurements. It counts as "3D" even if you just wish to make 2 perpendicular scans. A "2D" stress scan means a single line scan per wafer - the software does not even allow manual rotation of the stage for this type of scan.
*Info about making [https://labmanager.dtu.dk/view_binary.php?fileId=4699 2D stress measurements] ''(requires login)''. This text was removed from the user manual in LabManager as most users will want to make 3D stress measurements. It counts as "3D" if you wish to make 2 perpendicular scans. A "2D" stress scan means a single line scan per wafer - the software does not even allow manual rotation of the stage for this type of scan.


'''Acceptance test'''
'''Acceptance test'''
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