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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
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{{Template:Peg2configheader1
{{Template:Peg2configheader1
|TableHeader= 6: Currently valid from May 17 2023 onwards
|TableHeader= 6: Currently valid from June 13 2022 onwards
}}
}}
{{Template:Peg2configcontent1
{{Template:Peg2configcontent1
|ItemName= Available gasses and gas chemistry
|ItemName= Available gasses and gas chemistry
|ItemConfiguration= '''Available gasses:'''
|ItemConfiguration= '''Available gasses:'''
* SF<sub>6</sub>: 50 sccm
* SF<sub>6</sub>-1: 1200 sccm
* SF<sub>6</sub>-2: 50 sccm
* O<sub>2</sub>: 50 sccm
* O<sub>2</sub>: 50 sccm
* Ar: 283  
* Ar: 283  
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* C<sub>4</sub>F<sub>8</sub> (H<sub>2</sub> currently fitted but closed) : 0 sccm
* C<sub>4</sub>F<sub>8</sub> (H<sub>2</sub> currently fitted but closed) : 0 sccm
* CO<sub>2</sub>: (It is not in the software)  
* CO<sub>2</sub>: (It is not in the software)  
|ItemComment=OnlySF<sub>6</sub> and O<sub>2</sub> are used for Si, PR, and Cr etch. The rest is only make-up
|ItemComment=Only SF<sub>6</sub> and O<sub>2</sub> are used for Si, PR, and Cr etch. The rest is only make-up
}}
}}
{{Template:Peg2configcontent1
{{Template:Peg2configcontent1
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{{Template:Peg2configcontent1
{{Template:Peg2configcontent1
|ItemName= Recipes
|ItemName= Recipes
|ItemConfiguration= In the past, only recipes in the 'std' folder were allowed to run. Now, you can develop your own recipes '''as long as they don't violate any of the limitations/restrictions and rules in this table.'''
|ItemConfiguration= Do ''not'' run any recipes from the folder called 'z-Archive'.
|ItemComment= Be extremely careful with recipes in other folders than your own or the 'std' folder as they may no longer be safe to run because of hardware changes.
|ItemComment= The configuration of Pegasus 2 has changed over time (hence this table) so there is a large number of recipes that are no longer working. Also, some inappropriate settings in the some recipes (mainly with respect to the pressure control) have been identified. This is why it was decided that all existing (by autumn 2022) recipes be relocated to the folder called 'z-Archive' from which they must serve ''only'' as backup. To run a recipe in the z-Archive folder, it must be verified by the dry etch group and copied to another folder (typically user\group\****).
 
}}
}}
{{Template:Peg2configcontent1
{{Template:Peg2configcontent1
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|ItemConfiguration= The users and supervisors of Pegasus-2 must carefully read the 4 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.  
|ItemConfiguration= The users and supervisors of Pegasus-2 must carefully read the 4 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.  
|ItemComment= See the papers in the [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2#Publications_on_the_CORE_process |section below]].
|ItemComment= See the papers in the [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2#Publications_on_the_CORE_process |section below]].
}}
}}
|}
|}
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