Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OldConfig: Difference between revisions
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{{Template:Peg2configcontent1 | {{Template:Peg2configcontent1 | ||
|ItemName= Recipes | |ItemName= Recipes | ||
|ItemConfiguration= | |ItemConfiguration= Do ''not'' run any recipes from the folder called 'z-Archive'. | ||
|ItemComment= | |ItemComment= The configuration of Pegasus 2 has changed over time (hence this table) so there is a large number of recipes that are no longer working. Also, some inappropriate settings in the some recipes (mainly with respect to the pressure control) have been identified. This is why it was decided that all existing (by autumn 2022) recipes be relocated to the folder called 'z-Archive' from which they must serve ''only'' as backup. To run a recipe in the z-Archive folder, it must be verified by the dry etch group and copied to another folder (typically user\group\****). | ||
}} | }} | ||
{{Template:Peg2configcontent1 | {{Template:Peg2configcontent1 | ||