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Specific Process Knowledge/Characterization/XRD/XRD SmartLab: Difference between revisions

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0.4 mm x 8 mm (Line/Point)
0.4 mm x 8 mm (Line/Point)
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!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Goniometer
!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Goniometer
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Scanning mode
Scanning mode
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*Rx,Ry:-5~+5°
*Rx,Ry:-5~+5°
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Sample size
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Diameter: 150 mm
Thickness: 0~21 mm
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Optics
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Optics
|style="background:LightGrey; color:black"|Incident side
|style="background:LightGrey; color:black"|Incident side
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|style="background:LightGrey; color:black"|Substrate size
|style="background:LightGrey; color:black"|Substrate size
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|style="background:WhiteSmoke; color:black"|
up to 150 mm wafers
up to 150 mm wafers; thickness up to 21 mm
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| style="background:LightGrey; color:black"|Allowed materials
| style="background:LightGrey; color:black"|Allowed materials
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|style="background:WhiteSmoke; color:black"|
All materials
All materials allowed in the cleanroom
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