Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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[[file:DRIE-Pegasus.jpg |frame|left|200px|The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}}]] | [[file:DRIE-Pegasus.jpg |frame|left|200px|The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}}]] | ||
[[file:Pegasus 2 operator.jpg |frame|center| 100px|The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1. {{photo1}}]] | [[file:Pegasus 2 operator.jpg |frame|center| 100px|The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1. {{photo1}}]] | ||
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{| | {| | ||
| [[file:DRIE-Pegasus.jpg | | | [[file:DRIE-Pegasus.jpg |200px|frameless]] | ||
| [[file:Pegasus 2 operator.jpg | | | [[file:Pegasus 2 operator.jpg |200px|frameless]] | ||
| [[file:Peg3and4 front 2.JPG |frame|300px| | | [[file:Peg3and4 front 2.JPG |frame|300px|frameless]] | ||
|- | |- | ||
| align="center" | DRIE-Pegasus 1 | | align="center" | The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}} | ||
| align="center" | DRIE-Pegasus 2 | | align="center" | The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1. {{photo1}} | ||
| align="center" | DRIE | | align="center" | The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations. {{photo1}} | ||
|- | |- | ||
|} | |} | ||