Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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= DRIE-Pegasus 2= | = DRIE-Pegasus 2= | ||
{{Author-jmli1}} | {{Author-jmli1}} | ||
[[Image:Pegasus 2 operator.jpg | | [[Image:Pegasus 2 operator.jpg |300px|The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1. {{photo1}} ]] | ||
'''The user manual(s), user APV(s), technical information and contact information can be found in LabManager:''' | '''The user manual(s), user APV(s), technical information and contact information can be found in LabManager:''' | ||