Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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=== Publications on the CORE process === | === Publications on the CORE process === | ||
<span id="anchor_CORE1"></span> | <span id="anchor_CORE1"></span> | ||
The CORE process is described in detail in the publications below: | |||
; Nguyen, V. T. et al.: On the formation of black silicon in SF6-O2 plasma: The clear, oxidize, remove, and etch (CORE) sequence and black silicon on demand | ; Nguyen, V. T. et al.: On the formation of black silicon in SF6-O2 plasma: The clear, oxidize, remove, and etch (CORE) sequence and black silicon on demand | ||