Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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=== Publications on the CORE process === | === Publications on the CORE process === | ||
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; Nguyen, V. T. et al.: On the formation of black silicon in SF6-O2 plasma: The clear, oxidize, remove, and etch (CORE) sequence and black silicon on demand | ; Nguyen, V. T. et al.: On the formation of black silicon in SF6-O2 plasma: The clear, oxidize, remove, and etch (CORE) sequence and black silicon on demand | ||
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: https://doi.org/10.1116/6.0000196 | : https://doi.org/10.1116/6.0000196 | ||
; Vy Thi Hoang Nguyen et al.: The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF6/O2 Cycles with Excellent 3D Profile Control at Room Temperature | ; Vy Thi Hoang Nguyen et al.: The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF6/O2 Cycles with Excellent 3D Profile Control at Room Temperature | ||
: 2020 ECS J. Solid State Sci. Technol. 9 024002 | : 2020 ECS J. Solid State Sci. Technol. 9 024002 | ||