Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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: https://doi.org/10.1016/j.mee.2020.111228 | : https://doi.org/10.1016/j.mee.2020.111228 | ||
*[[Media:Grassfree1.pdf | *[[Media:Grassfree1.pdf ]] | ||
*[[Media:3DnanoSi.pdf | *[[Media:3DnanoSi.pdf ]] | ||
*[[Media:CORE1.pdf | *[[Media:CORE1.pdf ]] | ||
*[[Media:DREM1.pdf | *[[Media:DREM1.pdf ]] | ||