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Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions

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: https://doi.org/10.1016/j.mee.2020.111228
: https://doi.org/10.1016/j.mee.2020.111228


*[[Media:Grassfree1.pdf | ]]
*[[Media:Grassfree1.pdf ]]


*[[Media:3DnanoSi.pdf | ]]
*[[Media:3DnanoSi.pdf ]]
*[[Media:CORE1.pdf ]]
*[[Media:CORE1.pdf   ]]
*[[Media:DREM1.pdf | Bingdong Chang et al.: DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process]]
*[[Media:DREM1.pdf ]]